JPH024144B2 - - Google Patents

Info

Publication number
JPH024144B2
JPH024144B2 JP61187044A JP18704486A JPH024144B2 JP H024144 B2 JPH024144 B2 JP H024144B2 JP 61187044 A JP61187044 A JP 61187044A JP 18704486 A JP18704486 A JP 18704486A JP H024144 B2 JPH024144 B2 JP H024144B2
Authority
JP
Japan
Prior art keywords
vacuum
chuck
vacuum pick
housing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61187044A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245148A (ja
Inventor
Shuwarutsu Buradeimiru
Fureitoshisu Aburumu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of JPS6245148A publication Critical patent/JPS6245148A/ja
Publication of JPH024144B2 publication Critical patent/JPH024144B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automatic Assembly (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61187044A 1985-08-19 1986-08-11 半導体ウエ−ハ用の真空ピツク Granted JPS6245148A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/766,458 US4620738A (en) 1985-08-19 1985-08-19 Vacuum pick for semiconductor wafers
US766458 1985-08-19

Publications (2)

Publication Number Publication Date
JPS6245148A JPS6245148A (ja) 1987-02-27
JPH024144B2 true JPH024144B2 (en]) 1990-01-26

Family

ID=25076477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61187044A Granted JPS6245148A (ja) 1985-08-19 1986-08-11 半導体ウエ−ハ用の真空ピツク

Country Status (2)

Country Link
US (1) US4620738A (en])
JP (1) JPS6245148A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04270842A (ja) * 1991-02-05 1992-09-28 Mitsubishi Electric Corp 空調換気装置

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4875279A (en) * 1987-08-21 1989-10-24 E. I. Du Pont De Nemours And Company Die attach pickup tools
US5004399A (en) * 1987-09-04 1991-04-02 Texas Instruments Incorporated Robot slice aligning end effector
FR2624778B1 (fr) * 1987-12-22 1994-09-23 Recif Sa Embout pour pipette a vide
US4892343A (en) * 1988-10-05 1990-01-09 Hall Brian E Vacuum pencil
US5665430A (en) * 1992-09-30 1997-09-09 The United States Of America As Represented By The Secretary Of The Navy Chemical vapor deposition method for depositing diamond using a high temperature vacuum substrate mount
KR0135802B1 (ko) * 1994-07-11 1998-04-29 김광호 웨이퍼 운반장치 및 운반장치 제조방법
US5647626A (en) * 1995-12-04 1997-07-15 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer pickup system
US5783754A (en) * 1996-02-28 1998-07-21 Integrated Device Technology, Inc. Apparatus and method for measuring the gripping strength of a vacuum wand
US6024393A (en) * 1996-11-04 2000-02-15 Applied Materials, Inc. Robot blade for handling of semiconductor substrate
US5967882A (en) * 1997-03-06 1999-10-19 Keltech Engineering Lapping apparatus and process with two opposed lapping platens
US6149506A (en) * 1998-10-07 2000-11-21 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US5910041A (en) * 1997-03-06 1999-06-08 Keltech Engineering Lapping apparatus and process with raised edge on platen
US6120352A (en) * 1997-03-06 2000-09-19 Keltech Engineering Lapping apparatus and lapping method using abrasive sheets
US5993298A (en) * 1997-03-06 1999-11-30 Keltech Engineering Lapping apparatus and process with controlled liquid flow across the lapping surface
US6048254A (en) * 1997-03-06 2000-04-11 Keltech Engineering Lapping apparatus and process with annular abrasive area
US6102777A (en) * 1998-03-06 2000-08-15 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US5961169A (en) * 1998-07-27 1999-10-05 Strasbaugh Apparatus for sensing the presence of a wafer
US6327973B2 (en) * 1998-12-21 2001-12-11 Johnson & Johnson Vision Products, Inc. Printing on a carton with a vacuum support
US7011484B2 (en) * 2002-01-11 2006-03-14 Taiwan Semiconductor Manufacturing Co., Ltd. End effector with tapered fingertips
US6942265B1 (en) * 2002-10-23 2005-09-13 Kla-Tencor Technologies Corporation Apparatus comprising a flexible vacuum seal pad structure capable of retaining non-planar substrates thereto
US20050110292A1 (en) * 2002-11-26 2005-05-26 Axcelis Technologies, Inc. Ceramic end effector for micro circuit manufacturing
DE10259836A1 (de) * 2002-12-19 2004-07-15 Siemens Ag Greifer und Betriebsverfahren
SG125948A1 (en) * 2003-03-31 2006-10-30 Asml Netherlands Bv Supporting structure for use in a lithographic apparatus
US7055875B2 (en) * 2003-07-11 2006-06-06 Asyst Technologies, Inc. Ultra low contact area end effector
TWI310974B (en) * 2005-07-15 2009-06-11 Fabworx Solutions Inc An end effecter
US7690705B1 (en) * 2006-12-21 2010-04-06 Western Digital Technologies, Inc. Vacuum chuck useful for affixing cover seals to hard disk drives
US8122776B2 (en) * 2008-06-13 2012-02-28 Fox Michael A Handheld vacuum test fixture and method of monitoring vacuum cup differential pressure
JP5505305B2 (ja) * 2008-08-08 2014-05-28 旭硝子株式会社 基板の保持装置、基板の保持方法および合わせガラスの製造方法
ITBS20120176A1 (it) * 2012-12-07 2014-06-08 Gimatic Spa Elemento di presa per manipolatori
EP2905807B1 (en) * 2014-02-11 2019-03-13 Suss MicroTec Lithography GmbH Method and apparatus for preventing the deformation of a substrate supported at its edge area
JP6032234B2 (ja) * 2014-03-19 2016-11-24 信越半導体株式会社 ワーク保持装置
US9754812B2 (en) * 2015-02-22 2017-09-05 Camtek Ltd. Adaptable end effector
NL2018244B1 (en) * 2017-01-27 2018-08-07 Suss Microtec Lithography Gmbh Endeffektor
CN114905239B (zh) * 2021-02-09 2025-07-01 天津泓德汽车玻璃有限公司 一种柔性安装结构、通用型钉柱自动安装装置及安装方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2850279A (en) * 1954-03-29 1958-09-02 Miehle Goss Dexter Inc Sheet separator
US3158381A (en) * 1962-03-05 1964-11-24 Amagasaki Kosakusho Kk Vacuum chuck
US3484093A (en) * 1967-07-03 1969-12-16 Sylvania Electric Prod Article holding apparatus
US3711081A (en) * 1970-03-31 1973-01-16 Ibm Semiconductor wafer chuck
GB1513444A (en) * 1974-09-06 1978-06-07 Chemical Reactor Equip As Pick-up devices for lifting and moving semiconductor wafers
FR2431635A1 (fr) * 1978-07-20 1980-02-15 Sgn Soc Gen Tech Nouvelle Dispositif de prehension par ventouse
US4221356A (en) * 1978-11-09 1980-09-09 Fortune William S Vacuum operated holding fixture
DE3110341C2 (de) * 1980-03-19 1983-11-17 Hitachi, Ltd., Tokyo Verfahren und Vorrichtung zum Ausrichten eines dünnen Substrats in der Bildebene eines Kopiergerätes
US4493606A (en) * 1982-05-24 1985-01-15 Proconics International, Inc. Wafer transfer apparatus
US4496180A (en) * 1983-07-20 1985-01-29 Cincinnati Milacron Industries, Inc. Vacuum handling apparatus
US4506184A (en) * 1984-01-10 1985-03-19 Varian Associates, Inc. Deformable chuck driven by piezoelectric means

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04270842A (ja) * 1991-02-05 1992-09-28 Mitsubishi Electric Corp 空調換気装置

Also Published As

Publication number Publication date
US4620738A (en) 1986-11-04
JPS6245148A (ja) 1987-02-27

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